UHR SEM for nanomaterials characterization at sub-nanometer scale

• High-resolution and high-contrast imaging of nextgen materials (e.g. catalyst structures, nanotubes, nanoparticles and other nanoscale structures)

• Excellent platform suitable for SEM/STEM metrology at sub-nanometer scale

• Fast setup of the electron beam – optimal imaging conditions are guaranteed by the In-Flight Beam Tracing?

• Multi-detector system TriBE? and TriSE? for sample nanocharacterization

• Intuitive software modular platform designed for effortless operation regardless users’ skill level